ASYS

Amtech Systems, Inc. ASYS

Individual Beneficiary

Name of reporting person Citizenship or organization Sole voting power Shared voting power Sole dispositive power Shared dispositive power Amount beneficially owned Percent of class Accepted date
First Eagle Investment Management, LLC 0 0 0 0 783367 5.51 % 12/11/2024
First Eagle Investment Management, LLC State of Delaware 0 0 0 0 783367 5.51 % 12/11/2024
Wax Asset Management, LLC United States 961249 0 961249 0 961249 6.8 % 09/02/2024
Wax Asset Management, LLC United States 961249 0 961249 0 961249 6.8 % 09/02/2024
Pacific Ridge Capital Partners, LLC 803139 0 890679 0 890679 6.22 % 14/02/2022
Pacific Ridge Capital Partners, LLC With: 803139 0 890679 0 890679 6.22 % 14/02/2022
The Vanguard Group - 23-1945930 Pennsylvania 0 2560 467098 6842 473940 3.31 % 09/02/2022
30-0447847 Delaware Limited Partnership 1076372 0 1100195 0 1100195 7.7 % 08/02/2022
30-0447847 1076372 0 1100195 0 1100195 7.7 % 08/02/2022
52-2343049 New York 1203860 0 1203860 0 1203860 8.41 % 14/01/2022
30-0447847 1038590 0 1101212 0 1101212 7.8 % 12/02/2021
30-0447847 Delaware Limited Partnership 1038590 0 1101212 0 1101212 7.8 % 12/02/2021
Pacific Ridge Capital Partners, LLC 820389 0 899439 0 899439 6.4 % 10/02/2021
Pacific Ridge Capital Partners, LLC United States 820389 0 899439 0 899439 6.4 % 10/02/2021
The Vanguard Group - 23-1945930 Pennsylvania 0 2560 772182 4351 776533 5.52 % 10/02/2021
The Vanguard Group - 23-1945930 Pennsylvania 0 2560 772182 4351 776533 5.52 % 10/02/2021
Pacific Ridge Capital Partners, LLC United States 773452 0 851362 0 851362 5.97 % 12/02/2020
Pacific Ridge Capital Partners, LLC 773452 0 851362 0 851362 5.97 % 12/02/2020
Pacific Ridge Capital Partners, LLC United States 851362 0 851362 0 851362 5.97 % 12/02/2020
Pacific Ridge Capital Partners, LLC 851362 0 851362 0 851362 5.97 % 12/02/2020
52-2343049 New York 665841 0 665841 0 665841 4.67 % 04/02/2020
(. Delaware Limited Partnership 1186194 0 1261386 0 1261386 8.87 % 08/02/2019
52-2343049 New York 1121468 0 0 0 1121468 7.89 % 14/01/2019
52-2343049 New York 762430 0 762430 0 762430 5.18 % 03/01/2018
52-2343049 New York 1343961 0 1343961 0 1343961 10.2 % 03/01/2017
47-3106673 Delaware 600000 0 600000 0 600000 4.6 % 25/01/2016
26-4810266 Connecticut 22917 0 22917 0 22917 0.2 % 25/01/2016
Robert Averick United States of America 0 2400000 0 0 2400000 18.2 % 25/01/2016
20-6116984 Delaware 263688 0 263688 0 263688 2 % 25/01/2016
52-6435625 Connecticut 1386312 0 1386312 0 1386312 10.5 % 25/01/2016
52-2343049 New York 1382168 0 0 0 1382168 10.51 % 07/01/2016
Robert Averick Connecticut 0 150000 0 0 150000 1.1 % 27/08/2015
52-6435625 Connecticut 1386312 0 1386312 0 1386312 10.5 % 27/08/2015
26-4810266 Connecticut 22917 0 22917 0 22917 0.2 % 27/08/2015
20-6116984 Connecticut 263688 0 263688 0 263688 2 % 27/08/2015
47-3106673 Connecticut 140000 0 140000 0 140000 1.1 % 27/08/2015
52-6435625 Connecticut 1386312 0 1386312 0 1386312 10.6 % 12/06/2015
20-6116984 Connecticut 263688 0 263688 0 263688 2 % 12/06/2015
47-3106673 Connecticut 50000 0 50000 0 50000 0.4 % 12/06/2015
Robert Averick Connecticut 0 150000 0 0 150000 1.1 % 12/06/2015
52-2343049 New York 1384444 0 1384444 0 1384444 10.6 % 09/03/2015
20-6116984 Connecticut 208250 0 208250 0 208250 1.6 % 25/02/2015
52-6435625 Connecticut 996750 0 996750 0 996750 7.6 % 25/02/2015
Robert Averick Connecticut 0 150000 0 0 150000 1.1 % 25/02/2015
20-6116984 Delaware 208250 0 208250 0 208250 1.595 % 17/02/2015
Robert Averick United States of America 0 140000 0 0 140000 1.072 % 17/02/2015
52-6435625 Connecticut 891750 0 891750 0 891750 6.83 % 17/02/2015
52-2343049 New York 979324 0 979324 0 979324 9.92 % 05/01/2015
52-2343049 New York 979324 0 979324 0 979324 9.92 % 05/01/2015
20-6116984 Delaware 208250 0 208250 0 208250 2.2 % 03/01/2014
Robert Averick United States of America 0 100000 0 0 100000 1 % 03/01/2014
52-6435625 Connecticut 778150 0 778150 0 778150 8.1 % 03/01/2014
52-6435625 Connecticut 352250 0 352250 0 352250 3.7 % 27/03/2013
Robert Averick Connecticut 0 76100 0 76100 76100 0.8 % 27/03/2013
20-6116984 Connecticut 78250 0 78250 0 78250 0.8 % 27/03/2013
(. Delaware Limited Partnership 319472 0 323956 0 323956 3.42 % 11/02/2013
(. Delaware Limited Partnership 321503 0 332825 0 332825 3.53 % 13/02/2012
22-3367558 Teaneck, New Jersey 0 0 0 0 185100 1.97 % 15/02/2011
(. Delaware Limited Partnership 468790 0 484843 0 484843 5.17 % 11/02/2011
Richard L. Scott : 0 0 0 10 693881 7.7 % 08/09/2010
22-3367558 Teaneck New Jersey 234600 0 569400 0 569400 6.35 % 12/02/2010
22-3367558 Teaneck, New Jersey 0 0 0 0 569400 6.35 % 12/02/2010
INVESTMENT MANAGEMENT COMPANY, LLC #04-3409177 BOSTON, MASSACHUSETTS 726561 0 721196 0 726561 8.11 % 25/01/2010
INVESTMENT MANAGEMENT COMPANY, LLC #04-3409177 BOSTON, MASSACHUSETTS 726561 0 721196 0 726561 8.11 % 25/01/2010
22-3367558 PERSON WITH 229900 0 655671 0 655671 7.21 % 13/02/2009
#04-3409177 BOSTON, MASSACHUSSETTS 666297 0 696203 0 696203 7.65 % 13/02/2009
22-3367558 PERSON WITH 293700 0 515500 0 515 5.69 % 15/02/2008
22-2859704 United States 0 0 0 0 0 0 % 14/02/2008
04-2683227 Massachusetts 0 0 0 0 0 0 % 14/02/2008
ESSEX INVESTMENT MAGEMENT COMPANY, LLC #04-3409177 BOSTON, MASSACHUSSETTS 468751 0 498670 0 498670 5.51 % 31/01/2008
Richard L. Scott : 0 0 0 0 325050 4.99 % 03/10/2007
Richard L. Scott : 0 0 0 0 375000 5.8 % 17/07/2007
Richard L. Scott : 0 0 0 0 515000 8.4 % 16/02/2007
22-2859704 United States 0 245800 0 0 245800 7.07 % 14/02/2007
04-2683227 Massachusetts 0 245800 0 0 245800 7.07 % 14/02/2007
Michael A. Roth and Brian J. Stark, as joint filers pursuant to Rule 13d-1(k) United States of America 0 420000 0 0 420000 6.9 % 09/02/2007
Richard L. Scott : 0 0 0 0 484054 13.9 % 27/11/2006
Robert E Kern Jr. U.S.A. 0 136900 0 136900 136900 3.9 % 06/11/2006
David G. Kern U.S.A. 0 136900 0 136900 136900 3.9 % 06/11/2006
13-3958232 Delaware 136900 0 136900 0 136900 3.9 % 06/11/2006
Redpoint Partners LP Delaware 0 136900 0 136900 136900 3.9 % 06/11/2006
Redpoint Partners LP Delaware 0 240100 0 240100 240100 7 % 05/06/2006
David G. Kern U.S.A. 0 240100 0 240100 240100 7 % 05/06/2006
Robert E Kern Jr. U.S.A. 0 240100 0 240100 240100 7 % 05/06/2006
13-3958232 Delaware 240100 0 240100 0 240100 7 % 05/06/2006
(: United States 312500 0 312500 10 312500 9.6 % 02/05/2005

Senat trading

Bureau Date de la transaction Date de réception Type Amount Commentaire

Senat Divulgation

Représentant Date de la transaction Date de divulgation Type Amount District